THIN Ni SILICIDE FORMATION BY LOW TEMPERATURE-INDUCED METAL ATOM REACTION WITH ION IMPLANTED AMORPHOUS SILICON
- 著者名:
Erokhin, Yu.N. Patnaik, B.K. Pramanick, S. Hong, F. White, C.W. Rozgonyi, G.A. - 掲載資料名:
- Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 279
- 発行年:
- 1993
- 開始ページ:
- 237
- 終了ページ:
- 242
- 総ページ数:
- 6
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991743 [1558991743]
- 言語:
- 英語
- 請求記号:
- M23500/279
- 資料種別:
- 国際会議録
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