LASER INDUCED OXIDATION OF HEAVILY DOPED SILICON

LASER INDUCED OXIDATION OF HEAVILY DOPED SILICON

著者名:

掲載資料名:

Beam-solid interactions and phase transformations : symposium held December 2-4, 1985, Boston, Massachusetts, USA

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

51

発行年:

1985

開始ページ:

173

終了ページ:

178

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837166 [0931837162]

言語:

英語

請求記号:

M23500/51

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015537
シリーズID:	PA00000011
会議名:	Symposium on beam-solid interactions and phase transformations
回次:	1985
会議開催地:	Boston, MA, USA
会議開催年:	1985.12.02-1985.12.04

類似資料:

1 国際会議録 DOPANT INCORPORATION IN SILICON DURING NONEQUILIBRIUM SOLIDIFICATION: COMPARISON OF TWO PROCESSES Fogarassy, E. P., Lowndes, D. H., Narayan, J., White, C. W. Materials Research Society	7 国際会議録 UV Laser Induced Oxidation of Silicon in Solid and Liquid Phase Regime Fogarassy E., Slaoui A., Fuchs C. Martinus Nijihoff Publishers
2 国際会議録 PULSED LASER MELTING OF AMORPHOUS SILICON: TIME-RESOLVED AND POST-IRRADIATION STUDIES Lowndes, D. H., Wood, R. F., White, C. W., Narayan, J. North-Holland	8 国際会議録 DEVELOPMENT OF MORPHOLOGICAL INSTABILITY AND CELLS DURING RAPID SOLIDIFICATION OF LASER ANNEALED SILICON ALLOYS Narayan, J., White, C. W. North-Holland
3 国際会議録 OPTICAL PROPERTIES OF LASER INDUCED HEAVILY DOPED SILICON LAYERS Slaoui, A., Fogarassy, E., Siffert, P., Morphange, J. F., Balkanski, M. North-Holland	9 国際会議録 SOLIDIFICATION OF HIGHLY UNDERCOOLED SILICON: BULK NUCLEATION AND ANORPHOUS PHASE FORMATION Wood, R. F., Lowndes, D. H., Narayan, J. North-Holland
4 国際会議録 Analysis of defects in laser annealed GaAs Fletcher, John, Narayan, J., Lowndes, D.H. North Holland	10 国際会議録 Laser induced defects and materials interactions in the V-Si system Appleton, B.R., Stritzker, B., White, C.W., Narayan, J., Fletcher, J., Meyer, O., Lau, S.S. North Holland
5 国際会議録 PULSED EXCIMER LASER (308 nm) ANNEALING OF ION IMPLANTED SILICON AND SOLAR CELL FABRICATION Lowndes, D. H., Cleland, J., W., Christie, W. H., Eby, R. E., Jellison Jr., G. E, Narayan, J., Westbrook, R. D., Wood, … North-Holland	11 国際会議録 MELTING PHENOMENA AND IMPURITY REDISTRIBUTION DURING PULSED LASER IRRADIATION OF AMORPHOUS SILICON LAYERS Narayan, J., White, C. W., Holland, O. W. North-Holland
6 国際会議録 LASER-INDUCED SURFACE ACTIVATION OF ALUMINUM OXIDE FOR ELECTROLESS DEPOSITION Pedraza, A.J., Godbole, M.J., DeSilva, M.J., Lowndes, D.H. Materials Research Society	12 国際会議録 Surface engineering using excimer lasers (Invited Paper) Pedraza,A.J., Lowndes,D.H. SPIE-The International Society for Optical Engineering

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