Uedeno, A. ; Ujihira, Y. ; Wei, L. ; Tabuki, Y ; Tanigawa, S. ; Sugiura, J. ; Ogasawara, M. ; Tamura, M,
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.1061-1066, 1992. Pittsburgh, Pa.. Materials Research Society
Kametani, H. ; Akiyama, H. ; Yamaguchi, Y. ; Koumaru, M, ; Wei, L. ; Tabuki, Y. ; Tanigawa, S. ; Uedono, A. ; Watauchi, S. ; Ujihira, Y. ; Suzuki, R. ; Ohgaki, H. ; Mikado, T.
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.235-240, 1992. Pittsburgh, Pa.. Materials Research Society
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.277-282, 1992. Pittsburgh, Pa.. Materials Research Society
Uedono, A. ; Ujihira, Y. ; Wei, L. ; Tabuki, Yasushi ; Tanigawa, Shoichiro ; Wada, K ; Nakanishi, H.
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.325-330, 1992. Pittsburgh, Pa.. Materials Research Society
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