Kinoshita, H. ; Kimpara, Y. ; Uruga, T. ; Watanabe, T. ; Niibe, M. ; Platonov, Y. ; Wood, J.L.
出版情報:
Advances in mirror technology for synchrotron x-ray and laser applications : 20 July 1998, San Diego, California. pp.2-11, 1998. Bellingham, Wash., USA. SPIE
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Watanabe, T. ; Haga, T. ; Shoki, T. ; Hamamoto, K. ; Takada, S. ; Kazui, N. ; Kakunai, S. ; Tsubakino, H. ; Kinoshita, H.
出版情報:
Photomask and Next-Generation Lithography Mask Technology X. pp.1005-1013, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering