Schwarz, S. A. ; Palmstrom, C. J. ; Bhat, R. ; Koza, M. ; Wang, L. C. ; Park, M. H.
出版情報:
Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.. pp.471-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Ressel, P. ; Wang, L. C. ; Park, M. H. ; Leech, P. W. ; Reeves, G. K. ; Kuphal, E.
出版情報:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.577-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
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