BACKSIDE SIMS STUDY OF Ge/Pd NON-ALLOYED OHMIC CONTACTS ON InGaAs

BACKSIDE SIMS STUDY OF Ge/Pd NON-ALLOYED OHMIC CONTACTS ON InGaAs

著者名:

Schwarz, S. A.

掲載資料名:

Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

354

発行年:

1995

開始ページ:

471

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992559 [1558992553]

言語:

英語

請求記号:

M23500/354

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020770
シリーズID:	PA00000011
会議名:	Symposium on beam-solid interactions for materials synthesis and characterization
回次:	1994
会議開催地:	Boston, MA, USA
会議開催年:	1994.11.28-1994.12.02

類似資料:

1 国際会議録 Ge/Pd AND Si/Pd/Ge/Pd NON-ALLOYED OHMIC CONTACTS TO InP EXAMINED BY BACKSIDE SECONDARY ION MASS SPECTROMETRY Schwatz, S. A., Sands, T., Bhat, B., Koza, M., Pudensi, M. A. A., Wang,. L. C., Lau, S. A. Materials Research Society	7 国際会議録 Shallow and Low-Resistive Ohmic Contacts to p-In0.53Ga0.47As Based on Pd/Au and Pd/Sb Metallizations Ressel, P., Wang, L. C., Park, M. H., Leech, P. W., Reeves, G. K., Kuphal, E. MRS - Materials Research Society
2 国際会議録 OHMIC CONTACT FORMATION MECHANISM IN THE Ge/Pd/N-GaAs SYSTEM Marshall, E. D., Lau, S. S., Palmstrom, C. J., Sands, Timothy, Schwartz, C. L., Schwarz, S. A., Harbison, J. P., Florez, … Materials Research Society	8 国際会議録 OHMIC CONTACTS TO HEAVILY CARBON-DOPED p+-GaAs USING Ti/Si/Pd Lee, H. S., Han, W. Y., Lu, Y., Cole, M. W., Lareau, R. T., Casas, L., Thompson, R. J., DeAnni, A., Jones, K. A., Yang, … Materials Research Society
3 国際会議録 A HIGH DEPTH RESOLUTION BACKSIDE SECONDARY ION MASS SPECTROMETRY TECHNIQUE USED FOR STUDYING METAL/GaAs CONTACTS Palmstrom, C.J., Schwarz, S.A., Marshall, E.D., Yablonovitch, E., Harbison, J.P., Schwartz, C.L., Florez, L., Gmitter, … Materials Research Society	9 国際会議録 A Microstructural and Electrical Investigation of Pd/Ge/Ti/Au Ohmic Contact to n-Type GaAs Kwak, J. S., Baik, H. K., Kim, H., Lee, J.-L., Shin, D. W., Park, C. G. MRS - Materials Research Society
4 国際会議録 THE Ge/Pd/n-GaAs OHMIC CONTACT INTERFACE STUDIED BY BACKSIDE RAMAN SPECTROSCOPY Watte, J., Silverans, R. E., Munder, H., Palmstom, C. J., Florez, L. T., Hove, M. Van, Borghs, G., Wuyts, K. MRS - Materials Research Society	10 国際会議録 DEPTH-DEPENDENT MIXING OF AN AlAs-GaAs SUPERLATTICE BY ION IMPLANTATION Schwarz, S.A., Venkatesan, T., Bhat, R., Koza, M., Yoon, H.W., Arakawa, Y., Mei, P. Materials Research Society
5 国際会議録 STUDIES OF In0.53Ga0.47As/InP SUPERLATTICES MIXING AND CONVERSION Schwarz, S. A., Mei, P., Hwang, D. M., Schwartz, C. L., Venkatesan, T., Palmstrom, c. J., Stoffel, N. G., Bhat, R. Materials Research Society	11 国際会議録 Low contact resistivity Mn/Au/Ti/Pd/Au P-ohmic contacts for HBTs Vetanen, B., Haynes, C., Prasad, S. J., Beers, I., Park, S. MRS - Materials Research Society
6 国際会議録 Backside Nickel Based Ohmic Contacts to n-Type Silicon Carbide R. Ghandi, H.S. Lee, M. Domeij, C.M. Zetterling, M. Östling Trans Tech Publications	12 国際会議録 Non-Alloyed Ohmic Contacts for 850 nm Laser Structures for Improved Array Yield Tseng, B., Jan, W.Y., Cunningham, J.E., Krishnamoorthy, A., Goossen, K.E., Walker, C.A., Giaretta, G., Lothian, J.R., … Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12