Verhaegen, S. ; Nackaerts, A. ; Wiaux, V. ; Hendrickx, E. ; Vandenberghe, G.
出版情報:
Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA. pp.120-130, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Maurer, W. ; Wiaux, V. ; Jonckheere, R.M. ; Philipsen, V. ; Hoffmann, T. ; Verhaegen, S. ; Ronse, K.G. ; England, J.G. ; Howard, W.B.
出版情報:
18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. pp.175-181, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering