Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.439-442, 1992. Pittsburgh, Pa.. Materials Research Society
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.177-186, 1995. Pennington, NJ. Electrochemical Society
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.145-152, 1995. Pennington, NJ. Electrochemical Society