Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.117-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.47-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.157-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Tung, R. T. ; Howard, D. J. ; Ohmi, S. ; Caymax, M. ; Maex, K.
出版情報:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.427-, 1998. Warrendale, Pa.. MRS - Materials Research Society
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