Tsoukalas, D. ; Tsamis, C. ; Kouvatsos, D. ; Skarlatos, D.
出版情報:
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.348-358, 1996. Pennington, NJ. Electrochemical Society
Skarlatos, D. ; Omri, M. ; Tsamis, C. ; Claverie, A. ; Tsoukalas, D.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.914-925, 1998. Pennington, NJ. Electrochemical Society
Skarlatos, D. ; Giles, L. F. ; Tsamis, C. ; Claverie, A. ; Tsoukalas, D.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.289-, 1999. Warrendale, PA. MRS - Materials Research Society
Tsamis, C. ; Skarlatos, D. ; Raptis, I. ; Tsoukalas, D. ; Calvo, P. ; Colombeau, B. ; Cristiano, F. ; Claverie, A.
出版情報:
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.243-248, 2002. Warrendale, Pa.. Materials Research Society
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