1.

国際会議録
国際会議録
1. Reduction of CV Hysteresis in Metal/High-k MISFETs Using Flash Lamp Post Deposition Annealing
Matsuki, Takeo ; Akasaka, Yasushi ; Hayashi, Kiyoshi ; Noguchi, Masataka ; Yamashita, Koji ; Syoji, Hideyuki ; Torii, Kazuyoshi ; Kasai, Naoki ; Arikado, Tsunetoshi
出版情報: Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A..  pp.87-92,  2004.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 811
2.

国際会議録
国際会議録
2. Nitrided Hafnium Silicate Film Formation by Sequential Process Using a Hot Wall Batch System and Its Application to MOS Transistor
Aoyama, Tomonori ; Torii, Kazuyoshi ; Mitsuhashi, Riichirou ; Maeda, Takeshi ; Kamiyama, Satoshi ; Horiuchi, Atsushi ; Kitajima, Hiroshi ; Arikado, Tsunetoshi
出版情報: Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A..  pp.273-278,  2004.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 786