Morris, S. ; Lim, D. ; Yang, S. -H. ; Tian, S. ; Parab, K. ; Tasch, A. F.
出版情報:
Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.27-, 1996. Pittsburgh. MRS - Materials Research Society
Yang, S.-H. ; Morris, S. ; Tian, S. ; Parab, K. ; Tasch, A. F. ; Echenique, P. M. ; Capaz, R. ; Joannopoulos, J.
出版情報:
Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.77-, 1995. Pittsburgh. MRS - Materials Research Society
Yang, S.-H. ; Morris, S. ; Tian, S. ; Morris, M. ; Parab, K. ; Obradovich, B. ; Tasch, A.
出版情報:
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.481-495, 1996. Pennington, NJ. Electrochemical Society
Morris, S. ; Lim, D. ; Yang, S.-H. ; Tian, S. ; Parab, K. ; Tasch, A.F.
出版情報:
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.468-480, 1996. Pennington, NJ. Electrochemical Society