Boone, R.E. ; Lucas, K. ; Wynd, R. ; Boatright, M. ; Thompson, M.A. ; Reich, A.J.
出版情報:
Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA. pp.162-171, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering