Length Effects On The Reliability Of Dual-Damascene Cu Interconnects
- 著者名:
Wei, F. Gan, C.L. Thompson, C.V. Clement, J.J. Hau-Riege, S.P. Pey, K.L. Choi, W.K. Tay, H.L. Yu, B. Radhakrishnan, M.K. - 掲載資料名:
- Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 716
- 発行年:
- 2002
- 開始ページ:
- 645
- 終了ページ:
- 650
- 総ページ数:
- 6
- 出版情報:
- Warrendale: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996526 [1558996524]
- 言語:
- 英語
- 請求記号:
- M23500/716
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
SPIE-The International Society for Optical Engineering |