Dry etching resistance of methacrylate polymers for ArF excimer laser lithography
- 著者名:
Ohfuji,T. ( Association of Super-Advanced Electronics Technologies (Japan) ) Endo,M. ( Association of Super-Advanced Electronics Technologies (Japan) ) Takahashi,M. ( Association of Super-Advanced Electronics Technologies (Japan) ) Naito,T. ( Association of Super-Advanced Electronics Technologies (Japan) ) Tatsumi,T. ( Association of Super-Advanced Electronics Technologies (Japan) ) Kuhara,K. ( Association of Super-Advanced Electronics Technologies (Japan) ) Sasago,M. ( Association of Super-Advanced Electronics Technologies (Japan) ) - 掲載資料名:
- Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3333
- 発行年:
- 1998
- 巻:
- Part 1
- 開始ページ:
- 595
- 終了ページ:
- 600
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427786 [0819427780]
- 言語:
- 英語
- 請求記号:
- P63600/3333
- 資料種別:
- 国際会議録
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Novel strategy for the design of highly transparent ArF resists with excellent dry etch resistance
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