1.

国際会議録
国際会議録
1. Analytical TEM Observations of Combinatorial Catalyst Libraries for Hydrogen Production-As a Part of 'MATERIOMICS'
Akita, T. ; Ueda, A. ; Yamada, Y. ; Ichikawa, S. ; Tanaka, K. ; Kohyama, M. ; Kobayashi, T.
出版情報: Combinatorial and artificial intelligence methods in materials science II : symposium held December 1-4, Boston, Massachusetts, U.S.A.  pp.211-218,  2004.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 804
2.

国際会議録
国際会議録
2. Optical property measurement of thin superficial tissue by using time-resolved spectroscopy
Tanaka, K. ; Tanikawa, Y. ; Araki, R. ; Yamada, Y. ; Okada, E.
出版情報: Diagnostic optical spectroscopy in biomedicine II : 24-25 June 2003, Munich, Germany.  pp.315-324,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 5141
3.

国際会議録
国際会議録
3. Application of diluted developer solution (DDS) process to 193-nm photolithography process
Tanaka, K. ; Iwaki, H. ; Yamada, Y. ; Kiba, Y. ; Kamei, S. ; Goto, K.
出版情報: Advances in Resist Technology and Processing XIX.  Part One  pp.557-570,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4690
4.

国際会議録
国際会議録
4. Effect of the rinse solution to avoid 193-nm resist line collapse: a study for modification of resist polymer and process conditions
Masuda, S. ; Kobayashi, M. ; Kim, W.-K. ; Anyadiegwu, C. ; Padmanaban, M. ; Dammel, R.R. ; Tanaka, K. ; Yamada, Y.
出版情報: Advances in Resist Technology and Processing XXI.  pp.819-829,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 5376
5.

国際会議録
国際会議録
5. Improvement of pattern collapse issue by additive-added D.I water rinse process: II
Miyahara, O. ; Tanaka, K. ; Wakamizu, S. ; Kitano, J. ; Yamada, Y.
出版情報: Advances in Resist Technology and Processing XXI.  pp.830-841,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 5376
6.

国際会議録
国際会議録
6. Improvement of pattern collapse issue by additive-added D.I. water rinse process
Tanaka, K. ; Naito, R. ; Kitada, T. ; Kiba, Y. ; Yamada, Y. ; Kobayashi, M. ; Ichikawa, H.
出版情報: Advances in Resist Technology and Processing XX.  2  pp.1366-1381,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 5039