Blank Cover Image

Evaluation on Stress and Optical Property of Thin Films Used in Optical MEMS Device

著者名:
掲載資料名:
Thin films : stresses and mechanical properties X : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
795
発行年:
2002
開始ページ:
479
終了ページ:
484
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997332 [1558997334]
言語:
英語
請求記号:
M23500/795
資料種別:
国際会議録

類似資料:

1 国際会議録 Properties of Titanium Oxide Thin Film Prepared With E-Beam Evaporation

Hou, Ping, Sun, Lianchao (Richard)

Materials Research Society
7 国際会議録 Preparation and Optical Properties of Strontium-Barium-Bismuth Titanate Graded Thin Films

Xie, D., Pan, W., Hou, L.

Trans Tech Publications
2 国際会議録 Laser-induced structural, electrical, and optical properties evolution of phase change Ge2Sb2Te5 thin films

H. Sun, L. Hou, Y. Wu

Society of Photo-optical Instrumentation Engineers
8 国際会議録 Optical and morphological characteristics of organic thin films for optoelectronic devices

Z. Zhong, F. Sun

Society of Photo-optical Instrumentation Engineers
3 国際会議録 Organic thin film electroluminescent devices driven by AC

Zhang,F., Xu,Z., Yang,Z., Sun,L., Hou,Y., Wang,Y., Xu,X., Huang,Z.

SPIE-The International Society for Optical Engineering
9 国際会議録 Mechanical and Thermophysical Properties of Thin Film Materials for MEMS: Techniques and Devices

Obermeier, E.

MRS - Materials Research Society
4 国際会議録 Mechanical Properties and Residual Stress of Thin 3C-SiC(100) Films Determined Using MEMS Structures

B. Hähnlein, M. Stubenrauch, J. Pezoldt

Trans Tech Publications
10 国際会議録 Wafer Level Micropackaging Of MEMS Devices Using Thin Film Anodic Bonding

Rohwer, Lauren E.S., Oliver, Andrew D., Collins, Melissa V.

Materials Research Society
5 国際会議録 Mechanical Properties and Residual Stress of Thin 3C-SiC(111) Films Determined Using MEMS Structures

B. Hähnlein, M. Stubenrauch, S. Michael, J. Pezoldt

Trans Tech Publications
11 国際会議録 TuD16:Optical storage properties of novel azo-dye-doped polymer thin films

Wang,G., Hou,L., Gan,F.

SPIE - The International Society for Optical Engineering
6 国際会議録 Characterization of thin films and stack in MOEMS structure with ellipsometry and reflectometry techniques

Sun, L., Hou, P.

SPIE - The International Society of Optical Engineering
12 国際会議録 Homogenization and optical response properties of sculptured thin films

Lakhtakia,A., Sunal,P.D., Venugopal,V.C., Ertekin,E.

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12