Lahlouh, B. ; Rajagopalan, T. ; Lubguban, J. A. ; Biswas, N. ; Gangopadhyay, S. ; Sun, J. ; Huang, D. ; Simon, S. L. ; Kim, H. C. ; Volksen, W. ; Miller, R. D.
出版情報:
Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A.. pp.291-296, 2003. Warrendale, Pa.. Materials Research Society
Semiconductor and Organic Optoelectronic Materials and Devices. pp.30-38, 2000. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Semiconductor and Organic Optoelectronic Materials and Devices. pp.459-466, 2000. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering