Silicon Epitaxy and Its Application to RF ICs
- 著者名:
Ohguro, T. Naruse, H. Sugaya, H. Nakamura, S. Sugiyama, N. Morifuji, E. Kimijima, H. Yoshitomi, T. Morimoto, T. Momose, H.S. Katsumata, Y. Iwai, H. - 掲載資料名:
- ULSI process integration : proceedings of the first international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 99-18
- 発行年:
- 1999
- 開始ページ:
- 123
- 終了ページ:
- 142
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772419 [1566772419]
- 言語:
- 英語
- 請求記号:
- E23400/99-18
- 資料種別:
- 国際会議録
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