Spreitzer, R. L. ; Rafalski, S. A. ; Adams, D. ; Russell, S. W. ; Atzmon, Z. ; Li, J. ; Alford, T. L. ; Mayer, J. W.
出版情報:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.631-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Rafalski, S. A. ; Spreitzer, R. L. ; Russell, S. W. ; Alford, T. L. ; Li, J. ; Moinpour, M. ; Moghadam, F. ; Mayer, J. W.
出版情報:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.613-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
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