Blank Cover Image

Critical Processes for Ultrathin Gate Oxide Integrity

著者名:
Depas, M.
Heyns, M.M.
Nigam, T.
Kenis, K.
Sprey, H.
Wilhelm, R.
Crossley, A.
Sofield, C.J.
Graef, D.
さらに 4 件
掲載資料名:
The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
96-1
発行年:
1996
開始ページ:
352
終了ページ:
366
総ページ数:
15
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771511 [156677151X]
言語:
英語
請求記号:
E23400/962115
資料種別:
国際会議録

類似資料:

Nigam, T., Depas, M., Heyns, M., Sofield, C. J., Mapeldoram, L.

MRS - Materials Research Society

Vanhellemont,J., Kissinger,G., Graf,D., Kenis,K., Depas,M., Mertens,P., Lambert,U., Heyns,M., Claeys,C., Richter,H., …

Trans Tech Publications

Mertens, P.W., Meuris, M., Schmidt, H.F., Verhaverbeke, S., Heyns, M.M., Carr, P., Graeff, D., Schnegg, A., Kubota, M., …

Electrochemical Society

Bearda, T., Mertens, P.W., Woerlee, P.H., Wallinga, H., Sebmolke, R., Heyns, M.

Electrochemical Society

3 国際会議録 Effect of Cl in Gate Oxidation

Mertens, P. W., McGeary, M. J., Schaekers, M., Sprey, H., Vermeire, B., Depas, M., Meuris, M., Heyns, M. M.

MRS - Materials Research Society

Bearda, T., Mertens, P.W., Woerlee, P.H., Wallinga, H., Sebmolke, R., Heyns, M.

Electrochemical Society

4 国際会議録 Effect of Cl in Gate Oxidation

Mertens, P. W., McGeary, M. J., Schaekers, M., Sprey, H., Vermeire, B., Depas, M., Meuris, M., Heyns, M. M.

MRS - Materials Research Society

Nigam, T., Degraeve, R., Groeseneken, G., Heyns, M., Maes, H. E.

MRS-Materials Research Society

McGeary, M. J., Martens, P. W., Vermeire, B., Heyns, M., Sprey, H., Lubbers, A., Schaekers, M.

MRS - Materials Research Society

Hergenrother, J.M., Oh, S.H., Nigam, T., Monroe, D., Klemens, F.P., Kornblit, A., Baumann, F.H., Grazul, J.L., Johnson, …

Electrochemical Society

Vanhellemont, J., Kissinger, G., Senkader, S., Graef, D., Kenis, K., Depas, M., Lambert, U., Wagner, P.

Electrochemical Society

Dornberger, E., von Ammon, W., Graef, D., Lambert, U., Miller, A., Oelkrug, H., Ehlert, A.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12