CLEANING PROCEDURES FOR UHV CLUSTER-TOOL MOS FABRICATION
- 著者名:
Sofield, C.J. Murrell, M.P. Sugden, S. Heyns, M. Verhaverbecke, S. Welland, M.E. Golan, B. Barnes, J. - 掲載資料名:
- Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 259
- 発行年:
- 1992
- 開始ページ:
- 105
- 終了ページ:
- 112
- 総ページ数:
- 8
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991545 [1558991549]
- 言語:
- 英語
- 請求記号:
- M23500/259
- 資料種別:
- 国際会議録
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