Simoen, E. ; Poyai, A. ; Claeys, C. ; Czerwinski, A. ; Katcki, J.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1576-1592, 1998. Pennington, NJ. Electrochemical Society
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.386-395, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Poyai, A. ; Simoen, E. ; Claeys, C. ; Rooyackers, R. ; Redolfi, A.
出版情報:
Microelectronics technology and devices : SBMICRO 2002 : proceedings of the seventeenth international symposium. pp.213-222, 2002. Pennington, N.J.. Electrochemical Society
Poyai, A. ; Simoen, E. ; Claeys, C. ; Huber, A. ; Graef, D. ; Gaubas, E.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.694-706, 2002. Pennington, NJ. Electrochemical Society
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.75-92, 2001. Pennington, N.J.. Electrochemical Society