1.

国際会議録
国際会議録
1. ON THE ROLE OF INTERFACIAL DEFECT SITES DURING SOLID PHASE EPITAXIAL REGROWTH OF IMPLANTATION AMORPHIZED SILICON
Adekoya, W. O. ; Hage-Ali, M. ; Muller, J. C. ; Siffert, P.
出版情報: Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.447-452,  1988.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 100
2.

国際会議録
国際会議録
2. +INCOHERENT LIGHT ANNEALING OF GLOW DISCHARGE PF5- IMPLANTED SILICON: ANALYSIS OF DAMAGE RECOVERY AND ELECTRICAL ACTIVATION
Pedulli, L. ; Correra, L. ; Galloni, R. ; Adekoya, O. ; Barhdadi, A. ; Muller, J. C. ; Siffert, P.
出版情報: Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.363-366,  1985.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 45
3.

国際会議録
国際会議録
3. RAPID THERMAL OXIDATION OF HEAVILY DOPED SILICON
Slaoui, A. ; Hartiti, B. ; Busch, M. C. ; Muller, J. C. ; Siffert, P.
出版情報: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.409-414,  1991.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 224
4.

国際会議録
国際会議録
4. Classical and Rapid Thermal Process Effects on Oxygen and Carbon Precipitation in Silicon
Mahfoud, K. ; Loghmarti, M. ; Muller, J. C. ; Siffert, P.
出版情報: Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.971-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 378
5.

国際会議録
国際会議録
5. SHALLOW-JUNCTION FORMATION BY RAPID THERMAL DIFFUSION INTO SILICON FROM DOPED SPIN-ON GLASS FILMS
Ventura, L. ; Slaoui, A. ; Hartiti, B. ; Muller, J. C. ; Stuck, R. ; Siffert, P.
出版情報: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.345-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 342
6.

国際会議録
国際会議録
6. Effect of P-Doping Level-POCl3 Diffused or Spin-On Deposited-On the Gettering Efficiency of Polycrystalline Silicon After RTA or CTA
Loghmarti, M. ; Mahfoud, K. ; Muller, J. C. ; Sayah, D. ; Siffert, P.
出版情報: Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.333-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 378
7.

国際会議録
国際会議録
7. Influence of Oxygen on Rapid Thermal Co-Diffusion of Phosphorus and Aluminium in Silicon
Mahfoud, K. ; Hartiti, B. ; Muller, J. C. ; Siffert, P.
出版情報: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.413-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 387