Zhao, F.F. ; Shen, Z.X. ; Zheng, J.Z. ; Gao, W.Z. ; Osipowicz, T. ; Pang, C.H. ; Lee, P.S. ; See, A.K.
出版情報:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.41-46, 2002. Warrendale. Materials Research Society
Chen, S.Y. ; Shen, Z.X. ; Xu, S.Y. ; See, A.K. ; Chan, L.H. ; Li, W.S.
出版情報:
Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2002. Warrendale, PA. Materials Research Society
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