Gerlach, P. ; Hahn, P.O. ; Schnegg, A. ; Alpern, A. ; Menzel, G.
出版情報:
Characterization of the structure and chemistry of defects in materials : symposium held November 28-December 3, 1988, Boston, Massachusetts, U.S.A.. pp.267-272, 1989. Pittsburgh, Pa.. Materials Research Society
Schnegg, A. ; Prigge, H. ; Grundner, M. ; Hahn, P. O. ; Jacob, H.
出版情報:
Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.291-296, 1988. Pittsburgh, Pa.. Materials Research Society
SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A.. pp.247-252, 1988. Pittsburgh, Pa.. Materials Research Society
Mertens, P.W. ; Meuris, M. ; Schmidt, H.F. ; Verhaverbeke, S. ; Heyns, M.M. ; Carr, P. ; Graeff, D. ; Schnegg, A. ; Kubota, M. ; Dillenbeck, K. ; de Blank, R.
出版情報:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing. pp.87-102, 1993. Pennington, NJ. Electrochemical Society
Heyns, M. M. ; Verhaverbeke, S. ; Meuris, M. ; Mertens, P. W. ; Schmidt, H. ; Kubota, M. ; Philipossian, A. ; Dillenbeck, K. ; Graf, D. ; Schnegg, A. ; Blank, R. de
出版情報:
Surface chemical cleaning and passivation for semiconductor processing. pp.35-, 1993. Pittsburgh, PA. MRS - Materials Research Society