Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications. pp.47-55, 1995. Pennington, NJ. Electrochemical Society
Sato, N. ; Sakaguchi, K. ; Yamagata, K. ; Fujiyama, Y. ; Yonehara, T.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.443-454, 1994. Pennington, NJ. Electrochemical Society