Low-loss SPDT metal-to-metal contacts RF MEMS switch operted by electrostatic actuation [6035-06]

Low-loss SPDT metal-to-metal contacts RF MEMS switch operted by electrostatic actuation [6035-06]

著者名:

Seki T. ( Ritsumeikan Univ. (Japan), OMRON Corp. (Japan) )

Sato F. ( OMRON Corp. (Japan) )

Imanaka K. ( Ritsumeikan Univ. (Japan), OMRON Corp. (Japan) )

Sugiyama S. ( Ritsumeikan Univ. (Japan) )

さらに 5 件

掲載資料名:

Microelectronics: Design, Technology, and Packaging II

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6035

発行年:

2006

開始ページ:

603506

終了ページ:

603506

総ページ数:

1

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819460660 [0819460664]

言語:

英語

請求記号:

P63600/6035

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016070
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Microelectronics
回次:	2005 : 2nd
会議開催地:	Brisbane, Australia
会議開催年:	2005.12.12-2005.12.14

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