1.

国際会議録
国際会議録
1. Reaction-Transport Models of the Metalorganic Vapor Phase Epitaxy of Gallium Nitride
Puwlosvski, R.P. ; Theodoropoulos, C. ; Salinger, A.G. ; Moffat, H.K. ; Mountziuris, T.J. ; Shadid, J.N. ; Thrush, E.J.
出版情報: CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition.  pp.675-682,  2000.  Pennington, N.J..  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2000-13
2.

国際会議録
国際会議録
2. Modeling of a Silane LPCVD Process Used for Microelectronics and MEMS Fabrication
Pawlowski, R.P. ; Salinger, A.G. ; Habermehl, S.D. ; Ho, P.
出版情報: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.276-283,  2001.  Pennington, N.J..  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2001-13