Sakaguchi, K. ; Tsuboi, T. ; Yanagita, K. ; Okabe, T. ; Takahashi, K. ; Sato, N.
出版情報:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.31-38, 2003. Pennington, NJ. Electrochemical Society
Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications. pp.47-55, 1995. Pennington, NJ. Electrochemical Society
Sato, N. ; Sakaguchi, K. ; Yamagata, K. ; Fujiyama, Y. ; Yonehara, T.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.443-454, 1994. Pennington, NJ. Electrochemical Society
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