Rambach, M. ; Bauer, A. J. ; Frey, L. ; Friedrichs, P. ; Ryssel, H.
出版情報:
Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy. pp.621-624, 2005. Uetikon-Zuerich. Trans Tech Publications
Rommel, M. ; Graft, M. ; Frey, L. ; Bauer, A. J. ; Ryssel, H.
出版情報:
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France. pp.113-122, 2005. Pennington, N.J.. Electrochemical Society
Lemberger, M. ; Schon, F. ; Dirnecker, T. ; Jank, M. P. M. ; Pakaleva, A. ; Bauer, A. J. ; Frey, L. ; Ryssel, H.
出版情報:
EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium. pp.873-880, 2005. Pennington, NJ. Electrochemical Society
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