Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.35-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Cabral, C., Jr. ; Clevenger, L. A. ; Harper, J. M. E. ; Roy, R. A. ; Saenger, K. L. ; Miles, G. L. ; Mann, R. W.
出版情報:
Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.295-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Svilan, V. ; Rodbell, K. P. ; Clevenger, L. A. ; Cabral, C., Jr. ; Roy, R. A. ; Lavoie, C. ; Jordan-Sweet, J. ; Harper, J. M. E.
出版情報:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.53-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society