Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.. pp.261-266, 1988. Pittsburgh, Pa.. Materials Research Society
Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.. pp.311-316, 1988. Pittsburgh, Pa.. Materials Research Society
Kim, D. M. ; Qian, F. ; Solanki, R. ; Tuenge, R. T. ; King, C. N.
出版情報:
Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.743-748, 1988. Pittsburgh, Pa.. Materials Research Society