Streckfuss, N. ; Frey, L. ; Pichler, P. ; Kuegel, M. ; Zielonka, G. ; Ryssel, H.
出版情報:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing. pp.222-231, 1993. Pennington, NJ. Electrochemical Society
Jacob, M. ; Pichler, P. ; Wohs, M. ; Ryssel, H. ; Falster, R.
出版情報:
Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.. pp.129-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Cowern, N. E. B. ; Collart, E. J. H. ; Politiek, J. ; Bancken, P. H. L. ; Berkum, J. G. M. van ; Larsen, K. Kyllesbech ; Stolk, P. A. ; Huizing, H. G. A. ; Pichler, P. ; Burenkov, A. ; Gravesteijn, D. J.
出版情報:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.265-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.141-, 1999. Warrendale, PA. MRS - Materials Research Society
Alquier, D. ; Cowern, N. E. B. ; Pichler, P. ; Armand, C. ; Martinez, A. ; Mathiot, D. ; Omri, M. ; Claverie, A.
出版情報:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.67-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Colombeau, B. ; Smith, A.J. ; Cowern, N.E.B. ; Pawlak, B.J. ; Cristiano, F. ; Duffy, R. ; Claverie, A. ; Ortiz, C.J. ; Pichler, P. ; Lampin, E. ; Zechner, C.
出版情報:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.91-102, 2004. Warrendale, Pa.. Materials Research Society
Ghaderi, K. ; Hobler, G. ; Budil, M. ; Poetzl, H. ; Pichler, P. ; Ryssel, H. ; Hansch, W. ; Eisele, I. ; Tian, C. ; Stingeder, G.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.613-624, 1994. Pennington, NJ. Electrochemical Society
Scalese, S. ; Magna, A. La ; Mannino, G. ; Privitera, V. ; Bersani, M. ; Giubertoni, D. ; Solmi, S. ; Pichler, P.
出版情報:
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.205-210, 2003. Warrendale, Pa.. Materials Research Society