Streckfuss, N. ; Frey, L. ; Pichler, P. ; Kuegel, M. ; Zielonka, G. ; Ryssel, H.
出版情報:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing. pp.222-231, 1993. Pennington, NJ. Electrochemical Society
Jacob, M. ; Pichler, P. ; Wohs, M. ; Ryssel, H. ; Falster, R.
出版情報:
Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.. pp.129-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.141-, 1999. Warrendale, PA. MRS - Materials Research Society
Ghaderi, K. ; Hobler, G. ; Budil, M. ; Poetzl, H. ; Pichler, P. ; Ryssel, H. ; Hansch, W. ; Eisele, I. ; Tian, C. ; Stingeder, G.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.613-624, 1994. Pennington, NJ. Electrochemical Society
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