Lim, J. -H. ; Nam, K. -Y. ; Kim, K.-W. ; Kwon, Y -M ; Park, J. -G. ; Min. J. -H. ; Son, H. -H. ; Min, J. -Y. ; Yoon, K.-H.
出版情報:
Laser-generated, synchrotron, and other laboratory X-ray and EUV sources, optics, and applications II : 2-4 August 2005, San Diego, California, USA. pp.59181B-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Lee, G.-S. ; Park, J. -G. ; Choi, S. -P. ; Shin, C.-H, ; Sun, Y.-B ; Kwak, Y.-S. ; Shin, C.-K. ; Smith, W. L. ; Hahn, S.
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.1043-1048, 1992. Pittsburgh, Pa.. Materials Research Society
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