Advances in Single Wafer Chemical Deposition of Oxide and Nitride films
- 著者名:
- 掲載資料名:
- Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2001-7
- 発行年:
- 2001
- 開始ページ:
- 227
- 終了ページ:
- 240
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773133 [156677313X]
- 言語:
- 英語
- 請求記号:
- E23400/2001-7
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
Materials Research Society |
MRS - Materials Research Society | |
Electrochemical Society |
10
国際会議録
Chemical vapor deposition of Aluminum and Gallium Nitride thin films from metal organic precursors
Electrochemical Society |
5
国際会議録
Precursors for the Chemical Vapor Deposition of Titanium Nitride and Titanium Aluminum Nitride Films
MRS - Materials Research Society |
Society of Vacuum Coaters |
Society of Photo-optical Instrumentation Engineers |
Materials Research Society |