1.

国際会議録
国際会議録
1. Differential signal scatterometry overlay metrology: an accuracy investigation
D. Kandel ; M. Adel ; B. Dinu ; B. Golovanevsky ; P. Izikson ; V. Levinski ; I. Vakshtein ; P. Leray ; M. Vasconi ; B. Salski
出版情報: Optical Measurement Systems for Industrial Inspection V.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6616
2.

国際会議録
国際会議録
2. Diffraction based overlay metrology: accuracy and performance on front end stack
P. Leray ; S. Cheng ; D. Kandel ; M. Adel ; A. Marchelli
出版情報: Metrology, inspection, and process control for microlithography XXII.  1  pp.69220O-1-69220O-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6922