Sikder, A.K. ; Irfan, I.M. ; Kumar, Ashok ; Belyaev, A. ; Ostapenko, S. ; Calves, M. ; Harmon, J.P. ; Anthony, J.M.
出版情報:
Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society