Ono, N. ; Harada, K. ; Furukawa, J. ; Suzuki, K. ; Kida, M. ; Shimanuki, Y.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.503-514, 1998. Pennington, NJ. Electrochemical Society
Arai, Y. ; Kida, M. ; Ono, N. ; Abe, K. ; Machida, N. ; Furuya, H. ; Sahira, K.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.180-192, 1994. Pennington, NJ. Electrochemical Society