Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.145-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Li, Irene ; Forsthoefel, Kersten M. ; Richardson, Kathleen A. ; Obeng, Yaw S. ; Easter, William G. ; Maury, Alvaro
出版情報:
Chemical mechanical polishing 2000 -- fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A.. pp.E7.3-, 2001. Warrendale, PA. Materials Research Society