Bouayadi, R. El ; Regula, G. ; Pichaud, B. ; Lancin, M. ; Simon, J.J. ; Ntsoenzok, E.
出版情報:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society