Assaf, H. ; Ntsoenzok, E. ; Ruault, M-O. ; Ashok, S.
出版情報:
Materials, technology and reliability of low-k dielectrics and copper interconnects : symposium held April 18-21, 2006, San Francisco, California, U.S.A.. pp.439-444, 2006. Warrendale, Pa.. Materials Research Society
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.405-412, 2005. Warrendale, Pa.. Materials Research Society
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.327-338, 2005. Warrendale, Pa.. Materials Research Society
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