Advanced electron-beam writing system EX-11 for next-generation mask fabrication
- 著者名:
Tojo, T. ( Toshiba Corp. (Japan) ) Yoshikawa, R. ( Toshiba Corp. (Japan) ) Ogawa, Y. ( Toshiba Corp. (Japan) ) Tamamushi, S. ( Toshiba Corp. (Japan) ) Hattori, Y. ( Toshiba Corp. (Japan) ) Koikari, S. ( Toshiba Corp. (Japan) ) Kusakabe, H. ( Toshiba Corp. (Japan) ) Abe, T. ( Toshiba Corp. (Japan) ) Ogasawara, M. ( Toshiba Corp. (Japan) ) Akeno, K. ( Toshiba Corp. (Japan) ) Anze, H. ( Toshiba Corp. (Japan) ) Hattori, K. ( Toshiba Corp. (Japan) ) Hirano, R. ( Toshiba Corp. (Japan) ) Yoshitake, S. ( Toshiba Corp. (Japan) ) Iijima, T. ( Toshiba Corp. (Japan) ) Ohtoshi, K. ( Toshiba Corp. (Japan) ) Matsuki, K. ( Toshiba Corp. (Japan) ) Shimomura, N. ( Toshiba Corp. (Japan) ) Yamada, N. ( Toshiba Corp. (Japan) ) Higurashi, H. ( Toshiba Corp. (Japan) ) Nakayamada, N. ( Toshiba Corp. (Japan) ) Fukudome, Y. ( Toshiba Corp. (Japan) ) Hara, S. ( Toshiba Corp. (Japan) ) Murakami, E. ( Toshiba Corp. (Japan) ) Kamikubo, T. ( Toshiba Corp. (Japan) ) Suzuki, Y. ( Toshiba Corp. (Japan) ) , ( Toshiba Machine Co., Ltd. (Japan) ) Oogi, S. ( Toshiba Corp. (Japan) ) Shimizu, M. ( Toshiba Corp. (Japan) ) Nishimura, S. ( Toshiba Corp. (Japan) ) Tsurumaki, H. ( Toshiba Corp. (Japan) ) Yasuda, S. ( Toshiba Corp. (Japan) ) Ooki, K. ( Toshiba Corp. (Japan) ) Koyama, K. ( Toshiba Corp. (Japan) ) Watanabe, S. ( Toshiba Corp. (Japan) ) Yano, M. ( Toshiba Corp. (Japan) ) Suzuki, H. ( Toshiba Corp. (Japan) ) Hoshino, H. ( Toshiba Machine Co., Ltd. (Japan) ) Toriumi, M. ( Toshiba Machine Co., Ltd. (Japan) ) Watanabe, O. ( Toshiba Machine Co., Ltd. (Japan) ) Tsuji, K. ( Toshiba Machine Co., Ltd. (Japan) ) Katayama, M. ( Toshiba Machine Co., Ltd. (Japan) ) Tsuchiya, S. ( Toshiba Machine Co., Ltd. (Japan) ) Suzuki, K. ( Toshiba Machine Co., Ltd. (Japan) ) Kurasawa, S. ( Toshiba Machine Co., Ltd. (Japan) ) Okuzono, K. ( Toshiba Machine Co., Ltd. (Japan) ) Yamada, H. ( Toshiba Machine Co., Ltd. (Japan) ) Handa, K. ( Toshiba Machine Co., Ltd. (Japan) ) Akiyama, T. ( Toshiba Machine Co., Ltd. (Japan) ) Tada, Y. ( Toshiba Machine Co., Ltd. (Japan) ) Noma, A. ( Toshiba Machine Co., Ltd. (Japan) ) Takigawa, T. ( Toshiba Corp. (Japan) ) - 掲載資料名:
- Photomask and X-Ray Mask Technology VI
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3748
- 発行年:
- 1999
- 開始ページ:
- 416
- 終了ページ:
- 425
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819432308 [081943230X]
- 言語:
- 英語
- 請求記号:
- P63600/3748
- 資料種別:
- 国際会議録
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