Rapid thermal and other short-time processing technologies II : proceedings of the international symposium. pp.381-392, 2001. Pennington, NJ. Electrochemical Society
Nigam, T. ; Degraeve, R. ; Groeseneken, G. ; Heyns, M. ; Maes, H. E.
出版情報:
Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.337-, 2000. Warrendale, PA. MRS-Materials Research Society
Depas, M. ; Heyns, M.M. ; Nigam, T. ; Kenis, K. ; Sprey, H. ; Wilhelm, R. ; Crossley, A. ; Sofield, C.J. ; Graef, D.
出版情報:
The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface. pp.352-366, 1996. Pennington, NJ. Electrochemical Society
Oh, Sang-Hyun ; Hergenrdther, Jack ; Monroe, Don ; Nigam, T. ; Klemens, F.P. ; Kornblit, A. ; Mansfield, W.M. ; Baumaun, F.H. ; Gossmann, H.J. ; King, C.A. ; Kleiman, R, N. ; Vuong, H.-H. ; Weber, G.R. ; Rafferty, C.S.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B3.2-, 2001. Warrendale, PA. Materials Research Society
Nigam, T. ; Depas, M. ; Heyns, M. ; Sofield, C. J. ; Mapeldoram, L.
出版情報:
Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A.. pp.101-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society