1.

国際会議録
国際会議録
1. The Vertical Replacement-Gate (VRG) MOSFET: A High-Performance, Vertical MOSFET with Lithography-Independent Critical Dimensions
Hergenrother, J.M. ; Oh, S.H. ; Nigam, T. ; Monroe, D. ; Klemens, F.P. ; Kornblit, A. ; Baumann, F.H. ; Grazul, J.L. ; Johnson, R.W. ; King, C.A. ; Kleiman, R.N.
出版情報: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.381-392,  2001.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2001-9
2.

国際会議録
国際会議録
2. The Application of Solid Source Diffusion in the Vertical Replacement-Gate (VRG) MOSFET
Oh, Sang-Hyun ; Hergenrdther, Jack ; Monroe, Don ; Nigam, T. ; Klemens, F.P. ; Kornblit, A. ; Mansfield, W.M. ; Baumaun, F.H. ; Gossmann, H.J. ; King, C.A. ; Kleiman, R, N. ; Vuong, H.-H. ; Weber, G.R. ; Rafferty, C.S.
出版情報: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B3.2-,  2001.  Warrendale, PA.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 610