Ying, Hong ; Barnak, J. P. ; Chen, Y. L. ; Nemanich, R. J.
出版情報:
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.285-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Ying, Hong ; Wang, Zhihai ; Aldrich, D. B. ; Sayers, D. E. ; Nemanich, R. J.
出版情報:
Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.335-, 1994. Pittsburgh, PA. MRS - Materials Research Society
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