Barnak, J. P. ; Ying, H. ; Chen, Y. L. ; Montgomery, J. ; Nemanich, R. J.
出版情報:
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.351-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Wang, Z. ; Chen, Y. L. ; Ying, H. ; Nemanich, R. J. ; Sayers, D. E.
出版情報:
Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.397-, 1994. Pittsburgh, PA. MRS - Materials Research Society
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