Liu, H. X. ; Schneider, T. P. ; Montgomery, J. ; Chen, Y. L. ; Buczkowski, A. ; Shimura, F. ; Nemanich, R. J. ; Maher, D. M. ; Korzec, D. ; Engemann, J.
出版情報:
Surface chemical cleaning and passivation for semiconductor processing. pp.231-, 1993. Pittsburgh, PA. MRS - Materials Research Society
Barnak, J. P. ; King, S. ; Montgomery, J. ; Ku, Ja-Hum ; Nemanich, R. J.
出版情報:
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.357-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Barnak, J. P. ; Ying, H. ; Chen, Y. L. ; Montgomery, J. ; Nemanich, R. J.
出版情報:
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.351-, 1995. Pittsburgh, PA. MRS - Materials Research Society
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