Nemanich, R. J. ; Baumann, P. K. ; Benjamin, M. J. ; English, S. L. ; Hartman, J. D. ; Sowers, A. T. ; Ward, B. L. ; Yang, P. C.
出版情報:
Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.35-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Hartman, J. D. ; Naniwae, K. ; Petrich, C. ; Ramachandran, V. ; Feenstra, R. M. ; Nemanich, R. J. ; Davis, R. F.
出版情報:
Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.353-356, 2000. Zuerich, Switzerland. Trans Tech Publications
国際会議録
